This webinar presents a quick overview of the high-resolution X-ray diffraction (HR-XRD) methods and analyses that have evolved over the last 30 years to serve the semiconductor materials community. Typical applications are presented, including measurement of layer thickness, composition, strain, multilayer structure and crystal quality, using rocking curves and reciprocal space maps. The equipment and analysis software provided for each type of measurement are shown together with comment on what is special and new in PANalytical’s product portfolio. The webinar is aimed at an audience looking for an introduction to the application of high-resolution XRD to the measurement of epitaxial layers both in academia and in industry.
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