This webinar presents a quick overview of the high-resolution X-ray diffraction (HR-XRD) methods and analyses that have evolved over the last 30 years to serve the semiconductor materials community. Typical applications are presented, including measurement of layer thickness, composition, strain, multilayer structure and crystal quality, using rocking curves and reciprocal space maps. The equipment and analysis software provided for each type of measurement are shown together with comment on what is special and new in PANalytical’s product portfolio. The webinar is aimed at an audience looking for an introduction to the application of high-resolution XRD to the measurement of epitaxial layers both in academia and in industry.
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Panelist information: Patricia Kidd, Principal Scientist Materials, PANalytical B.V., The Netherlands.
Patricia studied for her undergraduate degree and doctorate in materials’ science at Oxford University, UK. She then worked for 10 years as a research fellow at the University of Surrey and at Queen Mary, University of London, and was involved in a number of thin films projects ranging from strained layer superlattices for optoelectronics, to lattice engineering of buffer layers and advanced XRD characterization of thin film multilayers. She joined PANalytical’s UK research center in 2000 and since 2013 has been active in product marketing.