X'Pert³ MRD
The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control.
Features include
- Wafer max. diameter: 100 mm
- SECS/GEM
- Cleanroom ISO 4
X'Pert³ is now a Smart Instrument!. Find out more
Find out moreThe X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control.
Features include
An extra PreFIX mounting platform allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing significantly the intensity of the incident beam.
Features include
X'Pert³ MRDLa nouvelle génération de diffractomètres polyvalents pour la recherche en matériaux |
X'Pert3 MRD (XL)La nouvelle génération de diffractomètres polyvalents pour la recherche en matériaux |
|
---|---|---|
Technologie | ||
Diffraction des rayons X (XRD) | ||
Type de mesure | ||
Identification de phase | ||
Quantification de la phase | ||
Métrologie des couches minces | ||
Contraintes résiduelles | ||
Rugosité de l'interface | ||
Analyse de l'épitaxie | ||
Analyse de texture | ||
Analyse de réseau réciproque | ||
Wafer max. diameter | 100 mm | 300 mm |
SECS/GEM | ||
Cleanroom ISO 4 |