Analysis of W films

To demonstrate the analytical precision of the 2830 ZT wafer analyzer, a 15-cycle repeated measurement was carried out. The wafer was loaded and unloaded between each cycle.

Production control of integrated circuits (ICs) frequently involves the analysis of tungsten layers on a Si substrate. Tungsten is used as conductor or metal film in the production of ICs, its role is to form the vertical interconnection wires between the transistors.


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