Measuring wafer orientation using a 5-axis cradle

Cadmium tungstate (CdWO4) wafers are used as scintillation crystals to detect gamma rays. Waveguides can be fabricated in the crystals using laser cutting followed by gap filling with highly reflecting materials. These are then coupled to a large area CMOS sensor to form an X-ray imaging system. Under some conditions it was found that cracks could be seen to propagate from the cut edges and that the crack propagation was dependent upon the direction of laser cutting.

The 5-axis Eulerian cradles on the X’Pert³ MRD (XL) series diffractometers and the 5-axis sample stage on the Empyrean, together with their high-resolution 2theta and omega goniometers, are designed for precision, flexibility and ease of use. Furthermore the combined rocking curve and triple axis (TA) PreFIX optic enables the hands-free change-over from high-speed peak finding routines to high-precision peak position measurements. The orientation of a single crystal cadmium tungstate wafer was obtained, using a combination of rapid scans that could easily be formulated into batch routines. 

ログイン

初めての方

会員登録いただくと、以下のような会員様限定コンテンツを無料でご覧いただけます。

  • 録画版ウェブセミナー、プレゼン資料、動画
  • アプリケーションノート、技術資料、記事、ホワイトペーパー、ソフトウェアダウンロード

加えて、以下の情報が定期的に届くメールニュースにも任意でご登録いただけます。

  • 最新のマルバーン・パナリティカル製品情報、技術情報、分析について学べるセミナー・ウェブセミナー・イベント情報