X'Pert³ MRD XL
Versatile materials research diffraction system
The long and successful history of Malvern Panalytical's Materials Research Diffractometers (MRD) continues with the generation of X’Pert³ MRD XL. The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:
• advanced materials science
• scientific and industrial thin film technology
• metrological characterization in semiconductor process development
The X'Pert³ MRD XL meets all the high-resolution XRD analysis requirements of the semiconductors, thin films, and advanced materials industries. Complete wafer mapping up to 200 mm is possible. The X’Pert3 version comes with longest liftetime of incident beam components (CRISP) and maximum uptime with pneumatic shutters and beam attenuators.
By facilitating analysis of wafers of up to 300 mm in diameter, with a sophisticated, automatic wafer loader option, the X'Pert³ MRD XL becomes an advanced tool for quality control of industrial thin layered structures.
Handbücher und Software
Bitte kontaktieren Sie den Support um die neueste Software Version zu bekommen.
Servicevertrags-Optionen
Solutions to maximize the return
on your investment
To assure that your instrument remains in top condition and performs on
the highest level, Malvern Panalytical offers a wide range of services. Our Expertise
and support services assure an optimal functioning of your instrument.
Support
Service for a lifetime
• Phone and remote support
• Preventive maintenance and checkups
• Flexible Customer Care Agreements
• Performance certificates
• Hardware and software upgrades
• Local and global support
Expertise
Adding value to your processes
• Sample preparation development/optimization
• Analytical methodologies
• Turnkey solutions for XRD
• Operations via IQ/OQ/PQ, quality assurance (GLP, ISO17025) or round robins/inter laboratory studies
• Automation of lab processes
• Consultancy services
Training and education
• Training on-site or at our competence centers
• Broad range of basic and advanced courses on products, applications and software
Analytical services and calibration materials
• Expert (XRF) analyses services
• Oxides and trace analysis
• Customized calibration materials