Additional sample stages
Measure a wider range of sample sizes in different process stages with additional sample stages designed to accommodate crystals smaller or larger than average.
The Omega/Theta XRD delivers the ultimate in combined precision and speed for determining crystal lattice. With results returned in as few as ten seconds, the Omega/Theta XRD features many process accessories from bar code readers to crystal stacking frames and can accommodate a range of samples of up to 30 kg in weight and 450 mm in length. It is a reliable partner to transfer the measured orientation to your processing tool.
The Omega/Theta XRD is your reliable future-proof partner for determining crystal orientation in the changeable semiconductor landscape. Market-leading precision, blazing fast measurement speed, and high-end build quality are combined with the power of automation – making sure your processes are ready for anything. Offering unparalleled efficiency and precision for crystal orientation and alignment, the Omega/Theta XRD is ideally suited to both production and research applications.
Our method requires only one measuring circle to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds.
All measurements on the Omega/Theta XRD are automated and are managed from within the user-friendly XRD software. The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM and similar interfaces.
Omega/Theta XRD can be used to characterize all single crystalline materials. Commonly used materials are:
Our wide range of accessories enhance the productivity of the Omega/Theta XRD in a wide range of applications from seed boring to grinding, to slicing all the way to wafer geometry end control – keeping you flexible even if those needs change over time. Add-ons include:
Technical specification | |
---|---|
X-ray source | Standard X-ray tube, Cu anode |
Detector | Scintillation counter (single or double) |
Sample holder | Precise turntable, mounting plate and tools for sample adjustment |
Crystal collimator | Available |
Mapping | Heavy duty mapping stage available |
Software | XRDStudio |
Water cooling | Flow – 4l/min, max. pressure 8 bar, T ≤ 30°C |
PC workstation | Windows 7 or latest, .NET Framework update |
Dimensions | H 1950 mm × D 820 mm × W 1200 mm |
Weight | ca, 650 kg |
Power requirement | 208-240 V, 16 A single phase, 50-60 Hz |
Certification | Manufactured under ISO 9001 guidelines, CE conform |
Measure a wider range of sample sizes in different process stages with additional sample stages designed to accommodate crystals smaller or larger than average.
Easily handle your various types of samples with dedicated sample adjustment tools.
Easily map crystal orientation or surface distortions onto a user-defined grid using an additional X-Y positioning stage above the turntable. The mapping stage enables comprehensive exploration of the entire sample surface via a customizable surface scan.
Precisely align ingots before sawing and enhance tool utilisation. The efficient stacking stage aligns ingots during the Azimuthal-scan, before transferring the complete stack over to the wire saw. This parallel sawing method is highly efficient.
Rapid and accurate quality control measurements for production processes. The rocking curve, indicative of lattice quality, can be assessed rapidly pointwise or in conjunction with a mapping tool for a quality map. The optic is automated for easy on/off toggling.
Flat and notch detection is made easier thanks to a high-quality photographic camera and extra image processing capabilities.
An optional laser scanner enables the measurement of precise sample shape, giving you deeper insight into your materials.
Smart, efficient processes are your advantage in a changing industry – and they start with the Omega/Theta XRD. Fully automated crystal orientation and alignment at the highest speed.