X’Pert³ MRD XL Cleanroom Package

More measuring environments, minimal extra investment

The X’Pert3 MRD XL Cleanroom Package comprises smart solutions, including a fan filter unit, for the MRD XL that can be retrofitted to your existing instrument or supplied with a new one.

By filtering the air around your semiconductor wafer sample, the MRD XL Cleanroom Package helps you avoid contamination when analyzing them. In turn, this enables you to measure in a wider range of environments without having to invest in a new instrument.

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The Cleanroom Package’s pre-filter and HEPA filter remove any airborne particles that enter the air inlet at a separation efficiency of at least 99.995%. In this way, the filter unit ensures a clean flow of purified air on and around the sample inside the MRD XL.

With cleanroom compliance up to ISO Class 4, the Cleanroom Package enables you to expand your possible range of measuring environments – supporting your transition from lab to fab, and the more complex analytical methods that come with it.

Benefits and features

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Suitable for multiple environments, including cleanrooms (ISO Class 4)Retrofit solution that maintains most safety certificationsA flexible, all-in-one package to fit your needsReduced capital expenditure – no need for a new instrumentHighly durable for an extended service lifetime

  • Cleanroom compliant up to ISO Class 4
    The Cleanroom Package is suitable for a wide range of environments, including laboratories, medical facilities, microenvironments, and cleanrooms.

  • Retrofitting in the field available
    The Cleanroom Package can be easily retrofitted to the X’Pert3 MRD XL in the field. Our service engineers will thoroughly clean the measurement chamber’s interior before installing the upgrade. Or, if you purchase a new X’Pert3 MRD XL with the Cleanroom Package, it’ll be built in the cleanroom and double packed.

  • Retains most safety certifications
    The Cleanroom Package is retrofitted to the X’Pert3 MRD XL using high-performance magnets, ensuring no physical change to the instrument cabinet. This method contains the system’s high-power X-ray resources, enabling you to maintain most existing safety certifications.

  • Modular approach
    The X’Pert3 MRD XL is a modular system. With multiple tools and functions available, it can be easily configured to meet your company’s needs and grow along with them. This all-in-one approach means you don’t need to invest as much in new instruments.

  • Long service lifetime
    Thanks to the Cleanroom Package’s excellent durability, you’re unlikely to need to replace it.


Our solutions are backed by the highest levels of customer service, support, and advice – whether it’s from our service engineers or our global customer support network. So, don’t hesitate to reach out to us!

  • Retrofitting in the field
  • Parts replacement and alignment in the field
  • Global customer support network