X'Pert³ is now a Smart Instrument!. Find out more
Find out moreThe improved X’Pert platform
The successful X'Pert platform is continued by the Malvern Panalytical’s X'Pert³ range of X-ray diffraction systems. With new on-board control electronics, compliance with the latest and most stringent X-ray and motion safety norms, advances in eco-friendliness and reliability the X'Pert³ platform is ready for the future.
• Longest lifetime of incident beam components with CRISP
• Maximum uptime with pneumatic shutters and beam attenuators
• Easy extension towards new applications thanks to 2nd generation PreFIX technology
• Rapid, reliable tool-free exchange of tube focus position
• New on-board control electronics with direct internet connection
• Compliance with the most stringent safety regulations
![]() X'Pert³ MRDVersatile research & development XRD system |
![]() X'Pert³ MRD XLVersatile research, development & quality control XRD system |
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Technology | ||
X-ray Diffraction (XRD) | ||
Measurement type | ||
Phase identification | ||
Phase quantification | ||
Thin film metrology | ||
Residual stress | ||
Interface roughness | ||
Epitaxy analysis | ||
Texture analysis | ||
Reciprocal space analysis | ||
Wafer max. diameter | 100 mm | 300 mm |
SECS/GEM | ||
Cleanroom ISO 4 |