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The improved X’Pert platform

The successful X'Pert platform is continued by the Malvern Panalytical’s X'Pert³ range of X-ray diffraction systems. With new on-board control electronics, compliance with the latest and most stringent X-ray and motion safety norms, advances in eco-friendliness and reliability the X'Pert³ platform is ready for the future.

• Longest lifetime of incident beam components with CRISP 
• Maximum uptime with pneumatic shutters and beam attenuators 
• Easy extension towards new applications thanks to 2nd generation PreFIX technology 
• Rapid, reliable tool-free exchange of tube focus position 
• New on-board control electronics with direct internet connection 
• Compliance with the most stringent safety regulations

X'Pert³ MRD

X'Pert³ MRD

Versatile research & development XRD system

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X'Pert³ MRD XL

X'Pert³ MRD XL

Versatile research, development & quality control XRD system

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X-ray Diffraction (XRD)
Measurement type
Phase identification
Phase quantification
Thin film metrology
Residual stress
Interface roughness
Epitaxy analysis
Texture analysis
Reciprocal space analysis
Wafer max. diameter 100 mm 300 mm
Cleanroom ISO 4