X'Pert³ is now a Smart Instrument!. Find out more
Find out more
Looking for more information?
To request a quote, more information or download a brochure select an option below.
The long and successful history of Malvern Panalytical's Materials Research Diffractometers (MRD) continues with a new generation – X’Pert³ MRD and X’Pert³ MRD XL. The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:
Both systems handle the same wide range of applications with full wafer mapping up to 100 mm (X’Pert³ MRD) or 200 mm (X’Pert³ MRD XL).
The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control.
These technologies make all systems field-upgradable to all existing options and new developments in hardware and software to come.
Tailored for research and development
For use with thin film samples, wafers and solid materials
Complete wafer mapping up to 100 mm
Versatile, flexible sample positioning
Optional extended arm for optical components
Outstanding accuracy with new high-resolution goniometer using Heidenhain encoders
The Malvern Panalytical X’Pert³ MRD and MRD XL are all-in-one X-ray solution systems that can be used in many industry applications, including:
Whether for growth studies or device design, the measurement of layer quality, thickness, strain and alloy composition using high-resolution XRD has been at the heart of research and development in electronic and optoelectronic multilayer semiconductor devices. With a choice of X-ray mirrors, monochromators and detectors, the X’Pert3 MRD and MRD XL offer high-resolution configurations to suit different materials systems ranging from lattice-matched semiconductors, through relaxed buffer layers on to novel exotic layers on non-standard substrates
Polycrystalline layers and coatings are an important component of many thin films and multilayer devices. The evolution of polycrystalline layer morphology during deposition is a key study area in functional materials research and development. X’Pert3 MRD and X’Pert3 MRD XL can be fully equipped with a range of slits, parallel beam X-ray mirror, polycapillary lens, crossed slits and monocapillaries to give the full choice of incident beam optics for reflectometry, stress, texture and phase ID.
Functional devices may contain disordered, amorphous or nanocomposite thin films. The flexibility of the X’Pert3 MRD and MRD XL systems allows for the incorporation of multiple analytical methods. A range of high-resolution optics, slits and parallel plate collimators are available to give the optimum performance for grazing incidence methods, in-plane diffraction and reflectometry.
Studying the behavior of materials under a variety of conditions is an essential part of materials research and process development. The X’Pert3 MRD and MRD XL are designed for the easy incorporation of the DHS1100 non-ambient sample stage from Anton Paar, enabling automated measurements under a range of temperatures and inert atmosphere
Instrument gives excellent accuracy and is of good quality.Good intensity and rapid performance. It is easy to operate.
Yifan Zheng — Zhejiang University of Technology
| Dimensions | 1972 x 1370 x 1131 mm |
|---|---|
| Weight | 1150 kg (instrument only) |
| Safety | Less than 1 µSv.h at 10 cm distance from the outside surface of the enclosure |
| Certification | Machine Directive 2006/42/EC
EMC Directive 2004/108/EC Declaration conformity with every instrument |
| Compressed air supply | House line, compressor or air bottle; 2-5 bar (0.2 - 0.5 MPa) |
| Anode material | Cu, Co, Cr, others on request |
| Focus | 0.4 mm x 12 mm (LFF) |
| Tube housing | Ceramic insulation
Pb free Patented design with CRISP technology X-ray induced ionized air |
| X-ray generator | 3 kW |
| Detector | Proportional, Xe-filled |
The PIXcel3D is a unique 2D solid-state hybrid pixel detector. Each pixel is 55 microns x 55 microns and the detector array is 256 x 256 pixels. The detector, now based on Medipix3 technology, brings unrivalled signal to noise with its point spread function of one pixel and multiple energy discrimination levels.
Unleash the potential of your data
Until now, instrument data has too often been stuck in manual records, spreadsheets or site-specific servers. By connecting the X'Pert3 to our Smart Manager and continually analyzing instrument data in the cloud, you can unleash its full potential. This is just one of our digital solutions that are part of Malvern Panalytical's Smart Manager.
Version number: 5
Version number: 7
Version number: 2
Version number: 4
Version number: 5
Version number: 3
Version number: 10
Version number: 9
Version number: 4
Version number: 5
Please contact support for the latest software version.
To assure that your instrument remains in top condition and performs on the highest level, Malvern Panalytical offers a wide range of services. Our expertise and support services assure an optimal functioning of your instrument.
Service for a lifetime
Adding value to your processes
Versatile XRD system for research & development. A new generation of tools for your wafer analysis.