The successful X'Pert platform is continued by the Malvern Panalytical’s X'Pert³ range of X-ray diffraction systems. With new on-board control electronics, compliance with the latest and most stringent X-ray and motion safety norms, advances in eco-friendliness and reliability the X'Pert³ platform is ready for the future.

• Longest lifetime of incident beam components with CRISP 
• Maximum uptime with pneumatic shutters and beam attenuators 
• Easy extension towards new applications thanks to 2nd generation PreFIX technology 
• Rapid, reliable tool-free exchange of tube focus position 
• New on-board control electronics with direct internet connection 
• Compliance with the most stringent safety regulations

Supported products

X'Pert³ MRD

Versatile research & development XRD system
Image
Measurement
Epitaxy analysis
Interface roughness
Phase identification
Phase quantification
Reciprocal space analysis
Residual stress
Texture analysis
Thin film metrology
Wafer mapping
100 mm
C-to-C wafer loader
No
Goniometer configuration
Horizontal goniometer, Θ-2Θ
Minimum step size
0.0001º
Technology
X-ray Diffraction (XRD)

X'Pert³ MRD XL

Versatile research, development & quality control XRD system
Image
Measurement
Epitaxy analysis
Phase identification
Phase quantification
Thin film metrology
Residual stress
Texture analysis
Reciprocal space analysis
Interface roughness
Wafer mapping
200 mm
C-to-C wafer loader
Yes
Goniometer configuration
Horizontal goniometer, Θ-2Θ
Minimum step size
0.0001º
Detector
PIXcel1D, PIXcel3D, Proportional counter, Scintilation detector
X-ray tube anode material
Cu, Co,Cr, Mn, Fe, Mo
Technology
X-ray Diffraction (XRD)

X'Pert³ Powder

X-ray diffraction platform
Image
Measurement
3D structure / imaging
Contaminant detection and analysis
Crystal structure determination
Interface roughness
Phase identification
Phase quantification
Pore size distribution
Residual stress
Surface area
Thin film metrology
Wafer mapping
No
C-to-C wafer loader
No
Goniometer configuration
Vertical goniometer, Θ-Θ
Minimum step size
0.001º
Detector
PIXcel3D, Proportional counter, Scintilation detector
X-ray tube anode material
Cu, Co,Cr, Mn, Fe, Mo, Ag
Technology
X-ray Diffraction (XRD)