X'Pert³ MRD XL

The PIXcel^3D is a unique 2D solid-state hybrid pixel detector. Each pixel is 55 microns x 55 microns and the detector array is 256 x 256 pixels. The detector, now based on Medipix3 technology, brings unrivalled signal to noise with its point spread function of one pixel and multiple energy discrimination levels.

The X’Pert³ MRD XL Cleanroom Package comprises smart solutions, including a fan filter unit, for the MRD XL that can be retrofitted to your existing instrument or supplied with a new one.

By filtering the air around your semiconductor wafer sample, the MRD XL Cleanroom Package helps you avoid contamination when analyzing them. In turn, this enables you to measure in a wider range of environments without having to invest in a new instrument.

As an additional software solution for our X’Pert³ MRD XL tool, automation can be integrated into your existing instrument to provide SECS/GEM compliant host control.

With these new capabilities, the MRD XL system can now play out its modularity and flexibility in a host controlled fab environment. This enables ensuring a contamination-free research or production environment.