The successful X'Pert platform is continued by the Malvern Panalytical’s X'Pert³ range of X-ray diffraction systems. With new on-board control electronics, compliance with the latest and most stringent X-ray and motion safety norms, advances in eco-friendliness and reliability the X'Pert³ platform is ready for the future.

• Longest lifetime of incident beam components with CRISP 
• Maximum uptime with pneumatic shutters and beam attenuators 
• Easy extension towards new applications thanks to 2nd generation PreFIX technology 
• Rapid, reliable tool-free exchange of tube focus position 
• New on-board control electronics with direct internet connection 
• Compliance with the most stringent safety regulations

Supported products

X'Pert³ MRD

Versatile materials research diffraction system
Image
Measurement
Epitaxy analysis
Interface roughness
Phase identification
Phase quantification
Reciprocal space analysis
Residual stress
Texture analysis
Thin film metrology
Wafer mapping
100 mm
C-to-C wafer loader
No
Goniometer configuration
Horizontal goniometer, Θ-2Θ
Minimum step size
0.0001º
Technology
X-ray Diffraction (XRD)

X'Pert³ MRD XL

Versatile materials research diffraction system
Image
Measurement
Epitaxy analysis
Phase identification
Phase quantification
Thin film metrology
Residual stress
Texture analysis
Reciprocal space analysis
Interface roughness
Wafer mapping
200 mm
C-to-C wafer loader
Yes
Goniometer configuration
Horizontal goniometer, Θ-2Θ
Minimum step size
0.0001º
Detector
PIXcel1D, PIXcel3D, Proportional counter, Scintilation detector
X-ray tube anode material
Cu, Co,Cr, Mn, Fe, Mo
Technology
X-ray Diffraction (XRD)

X'Pert³ Powder

The next generation cost-effective, multipurpose X-ray diffraction platform
Image
Measurement
3D structure / imaging
Contaminant detection and analysis
Crystal structure determination
Interface roughness
Phase identification
Phase quantification
Pore size distribution
Residual stress
Surface area
Thin film metrology
Wafer mapping
No
C-to-C wafer loader
No
Goniometer configuration
Vertical goniometer, Θ-Θ
Minimum step size
0.001º
Detector
PIXcel3D, Proportional counter, Scintilation detector
X-ray tube anode material
Cu, Co,Cr, Mn, Fe, Mo, Ag
Technology
X-ray Diffraction (XRD)