CMP slurry

Characteristics of abrasive materials used in Chemical Mechanical Polishing (CMP) slurry composition

Chemical mechanical polishing (CMP) is an integral part of any silicon SEMI fab. Integrated circuits made using lithography and thin film deposition invariably employ CMP to achieve the desired planarity of the substrate and the deposited layers. CMP slurries typically consist of a nano-sized abrasive powder dispersed in a chemically reactive solution. While chemical etching softens the material, the mechanical abrasion removes the material, thus flattening the topographic features and making the surface planar. Only chemical etching is isotropic and does not flatten the surface topography, while mechanical abrasion flattens the surface but introduces surface defects. A properly designed CMP process can achieve planarity without introducing surface defects.

The size distribution of the abrasive particles is the critical design parameter in a CMP slurry, affecting key metrics such as the rate of material removal and surface defects. Another important parameter is the dispersion/aggregation of particles in the slurry. Agglomerated particles behave like oversized particles, resulting in surface damage during the polishing process. 

The typical size range of CMP abrasive particles is 10-250 nanometres. Several particle sizing techniques are capable of measuring particle size in this range with varying accuracy and precision. Laser diffraction, dynamic light scattering, and small-angle X-ray scattering are the key techniques for delivering high accuracy and precision in this size range.

Aggregation may cause oversize aggregates of up to 10 microns typically in the ppm range in numbers. Slurry stability against particle aggregation can be determined using zeta potential. The presence of oversized particles can be detected using light scattering or imaging techniques.

Characterization of CMP slurry and its components

Malvern Panalytical has solutions and equipment to optimize various parameters of the CMP slurry used in the semiconductor industry:

  • Zetasizer : Particle size analysis from sub-nanometre to several microns. Additionally, it measures zeta potential to investigate slurry stability. 
  • Mastersizer 3000 : Particle size analysis from 10nm to 3mm as dry powder or slurry dispersion including oversized particles.
  • Morphologi 4 : Detection of oversized particles 0.5µm onwards.
  • Empyrean : Particle size analysis in 1-100nm particle size range using small-angle X-ray scattering .

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Our solutions

Zetasizer range

Nanoparticle size and zeta potential analysis
Zetasizer range

Empyrean range

Platform for XRD, SAXS, and XRR analysis
Empyrean range

Morphologi 4

Particle shape analysis with high statistical accuracy
Morphologi 4