In this report, the reproducibility and long-term stability is shown of the PANalytical 2830 ZT Wafer Analyzer in determining the boron and phosphorus concentration and film thickness of BPSG films. For the determination of the boron concentration, the gauge capability will be shown as a function of process tolerance.

In the semiconductor industry the monitoring of the deposition process of dielectrics such as BPSG is a demanding analytical application, requiring both high measurement accuracy and excellent precision. Wavelength dispersive X-ray fluorescence has been proven to meet these criteria. 

Login

 
  You need to provide a valid email address which will also be your username for the site.

Not registered yet?

Sign up for free today. By registering you will have free access to exclusive content including

  • Webinars, presentations and videos
  • Application notes, technical notes, articles, white papers and software downloads

And in addition you will receive

  • Our regular eNews including the latest news, education, events and offers from Malvern Panalytical