Wafer Analysis WD XRF

Solution for Analyzing Semiconductor Device Performance

In the rapidly changing world of technology, trends come and go. Video cassettes, compact discs, car phones, and Walkmans were once breakthrough innovations that significantly helped society but have been replaced with more sophisticated engineering.

Yet, there is one technological trend that remains unchanged over time: size. Even in 2022, as every year, the saying “smaller is better” still holds true.

Challenges in the Semiconductor Industry

However, becoming smaller also means becoming more complex because more technical performance needs to be packed into increasingly smaller devices and components. This is a clear trend in the current semiconductor market. To meet the evolving demands of the automotive, computing, and data storage sectors, manufacturers are under pressure to create more compact yet complex devices.

Smaller Technology, Bigger Requirements

As semiconductor layers become steadily thinner and more complex, measurement techniques like X-ray metrology have also become more complex. Improving accuracy is crucial, and innovative solutions are needed to consistently produce reliable results.

The semiconductor industry faces various challenges in XRF wafer metrology. These include varied substrates, result variability between tools and fabs, and increasingly thinner layers including 2D materials. Consistency, automated quality monitoring, and sensitivity of semiconductor metrology tools are all crucial considerations. How can these challenges be overcome, and how can fabs prepare for the industry’s future?

2830 ZT Wafer Analyzer

The 2830 ZT Wafer Analyzer is the ultimate solution for measuring film thickness and composition using Wavelength Dispersive X-ray Fluorescence (WDXRF). It addresses all of the industrial challenges above.

It provides XRF analysis within the 0.2 nm – 10 μm range and can handle flat substrates with diameters up to 300 mm. The 2830 ZT is fully automated, cleanroom compliant, and represents the most stable solution for fabs.

Efforts for Continuous Optimization

Malvern Panalytical is ready to support those working in the semiconductor industry. We are committed to continuously improving our instruments and developing innovative technologies. No matter how long the microchip shortage lasts, we will prepare the latest solutions for an industry that cannot afford to wait.

Additional Links

Introduction to Semiconductor Solutions Video

Malvern Panalytical Future Days: Focus on Semiconductors