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Zetium
Elemental excellence
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More details
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Measurement |
Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
Elemental range |
Be-U
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Resolution (Mn-Ka) |
35eV
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LLD |
0.1 ppm - 100%
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Sample throughput |
Up to - 240per 8h day
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Technology |
X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) |
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Epsilon 1
Small, powerful and portable XRF analyzer
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More details
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Measurement |
Elemental analysis, Contaminant detection and analysis, Elemental quantification |
Elemental range |
Na-Am
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Resolution (Mn-Ka) |
135eV
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LLD |
1 ppm - 100%
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Sample throughput |
Up to - 80per 8h day
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Technology |
X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) |
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Epsilon 4
Fast and accurate at-line elemental analysis
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More details
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Measurement |
Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
Elemental range |
C-Am
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Resolution (Mn-Ka) |
135eV
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LLD |
1 ppm - 100%
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Sample throughput |
Up to - 160per 8h day
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Technology |
X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) |
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Epsilon Xflow
Direct insight in your production process
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More details
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Measurement |
Elemental analysis |
Elemental range |
Na-Am
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Resolution (Mn-Ka) |
135eV
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LLD |
1 ppm - 100%
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Sample throughput |
on-line/ continuous
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Technology |
X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) |
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2830 ZT
Advanced semiconductor thin film metrology solution
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More details
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Measurement |
Chemical identification, Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
Elemental range |
Be-U
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Resolution (Mn-Ka) |
35eV
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Sample throughput |
up to 25 wafers per hour
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LLD |
0.1 ppm - 100%
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Technology |
X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) |
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Axios FAST
High sample throughput
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More details
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Measurement |
Thin film metrology, Elemental analysis, Elemental quantification |
Elemental range |
Be-U
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Resolution (Mn-Ka) |
35eV
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LLD |
0.1 ppm - 100%
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Sample throughput |
Up to - 480per 8h day
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Technology |
X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) |