XRF spectrometers can be configured with dedicated software options for specific types of X-ray fluorescence analysis. In combination with application modules (application configuration, calibration and standards) or as a package with sample preparation products, complete analytical solutions are created. All Malvern Panalytical products are supported by our after-sales and customer service organization.

In our Knowledge Center, you will find more information about the many interesting XRF applications that are possible with our spectrometers

Zetium

Epsilon 1

Epsilon 4

Epsilon Xflow

2830 ZT

Axios FAST

Zetium

Elemental excellence

Epsilon 1

Small, powerful and portable XRF analyzer

Epsilon 4

Fast and accurate at-line elemental analysis

Epsilon Xflow

Direct insight in your production process

2830 ZT

Advanced semiconductor thin film metrology solution

Axios FAST

High sample throughput

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Measurement type
Thin film metrology
Elemental analysis
Contaminant detection and analysis
Elemental quantification
Chemical identification
Technology
Wavelength Dispersive X-ray Fluorescence (WDXRF)
Energy Dispersive X-ray Fluorescence (EDXRF)
Elemental range Be-U Na-Am C-Am Na-Am Be-U Be-U
LLD 0.1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 0.1 ppm - 100% 0.1 ppm - 100%
Resolution (Mn-Ka) 35eV 135eV 135eV 135eV 35eV 35eV
Sample throughput Up to - 240per 8h day Up to - 80per 8h day Up to - 160per 8h day on-line/ continuous up to 25 wafers per hour Up to - 480per 8h day