Expert XRF spectrometers for elemental composition analysis
Malvern Panalytical offers a versatile range of X-ray fluorescence spectrometers and related products for elemental and thin film analysis. These XRF analyzers are suitable for a wide range of analysis and throughput requirements and operating environments. The spectrometers range from energy-dispersive benchtop XRF systems to wavelength-dispersive high-performance XRF systems and products for semiconductor measurement.
XRF spectrometers can be configured with dedicated software options for specific types of X-ray fluorescence analysis. In combination with application modules (application configuration, calibration and standards) or as a package with sample preparation products, complete analytical solutions are created. All Malvern Panalytical products are supported by our after-sales and customer service organization.
In our Knowledge Center, you will find more information about the many interesting XRF applications that are possible with our spectrometers
ZetiumSmart Zetium for reliable results and robust operation |
Epsilon 1Small, powerful and portable XRF analyzer |
Epsilon 4Fast and accurate at-line elemental analysis |
Epsilon XflowDirect insight in your production process |
2830 ZTAdvanced semiconductor thin film metrology solution |
Axios FASTXRF of choice for highest throughput or shortest measurement time |
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| More details | More details | More details | More details | More details | More details | |
| Measurement type | ||||||
| Thin film metrology | ||||||
| Elemental analysis | ||||||
| Contaminant detection and analysis | ||||||
| Elemental quantification | ||||||
| Chemical identification | ||||||
| Technology | ||||||
| X-ray Fluorescence (XRF) | ||||||
| Wavelength Dispersive X-ray Fluorescence (WDXRF) | ||||||
| Energy Dispersive X-ray Fluorescence (EDXRF) | ||||||
| Elemental range | Be-Am | F-Am | F-Am | Na-Am | B-Am | B-Am |
| LLD | 0.1 ppm - 100% | 1 ppm - 100% | 1 ppm - 100% | 1 ppm - 100% | 0.1 ppm - 100% | 0.1 ppm - 100% |
| Resolution (Mn-Ka) | 35eV | 135eV | 135eV | 135eV | 35eV | 35eV |
| Sample throughput | Up to - 240per 8h day | Up to - 80per 8h day | Up to - 160per 8h day | on-line/ continuous | up to 25 wafers per hour | Up to - 480per 8h day |
