X'Pert³ is now a Smart Instrument!. Find out more

Find out more

X'Pert³

The improved X’Pert platform

The successful X'Pert platform is continued by the Malvern Panalytical’s X'Pert³ range of X-ray diffraction systems. With new on-board control electronics, compliance with the latest and most stringent X-ray and motion safety norms, advances in eco-friendliness and reliability the X'Pert³ platform is ready for the future.

• Longest lifetime of incident beam components with CRISP 
• Maximum uptime with pneumatic shutters and beam attenuators 
• Easy extension towards new applications thanks to 2nd generation PreFIX technology 
• Rapid, reliable tool-free exchange of tube focus position 
• New on-board control electronics with direct internet connection 
• Compliance with the most stringent safety regulations

X'Pert³ MRD

The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control.

Features include

  • Wafer max. diameter: 100 mm
  • SECS/GEM
  • Cleanroom ISO 4
X'Pert³ MRD

X'Pert³ MRD XL

An extra PreFIX mounting platform allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing significantly the intensity of the incident beam.

Features include

  • Wafer max. diameter: 300 mm
  • SECS/GEM
  • Cleanroom ISO 4
X'Pert³ MRD XL
X'Pert³ MRD

X'Pert³ MRD

Versatile research & development XRD system

X'Pert³ MRD XL

X'Pert³ MRD XL

Versatile research, development & quality control XRD system

Technology
X-ray Diffraction (XRD)
Measurement type
Phase identification
Phase quantification
Thin film metrology
Residual stress
Interface roughness
Epitaxy analysis
Texture analysis
Reciprocal space analysis
Wafer max. diameter 100 mm 300 mm
SECS/GEM
Cleanroom ISO 4