X-ray fluorescence spectrometers (XRF)

Expert XRF spectrometers for elemental composition analysis

XRF spectrometers can be configured with dedicated software options for specific types of X-ray fluorescence analysis. In combination with application modules (application configuration, calibration and standards) or as a package with sample preparation products, complete analytical solutions are created. All Malvern Panalytical products are supported by our after-sales and customer service organization.

In our Knowledge Center, you will find more information about the many interesting XRF applications that are possible with our spectrometers

Zetium

Zetium

Smart Zetium for reliable results and robust operation

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Epsilon 1

Epsilon 1

Small, powerful and portable XRF analyzer

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Epsilon 4

Epsilon 4

Fast and accurate at-line elemental analysis

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Epsilon Xflow

Epsilon Xflow

Direct insight in your production process

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2830 ZT

2830 ZT

Advanced semiconductor thin film metrology solution

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Axios FAST

Axios FAST

XRF of choice for highest throughput or shortest measurement time

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Measurement type
Thin film metrology
Elemental analysis
Contaminant detection and analysis
Elemental quantification
Chemical identification
Technology
X-ray Fluorescence (XRF)
Wavelength Dispersive X-ray Fluorescence (WDXRF)
Energy Dispersive X-ray Fluorescence (EDXRF)
Elemental range Be-Am F-Am F-Am Na-Am B-Am B-Am
LLD 0.1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 0.1 ppm - 100% 0.1 ppm - 100%
Resolution (Mn-Ka) 35eV 135eV 135eV 135eV 35eV 35eV
Sample throughput Up to - 240per 8h day Up to - 80per 8h day Up to - 160per 8h day on-line/ continuous up to 25 wafers per hour Up to - 480per 8h day