XRF spectrometers can be configured with dedicated software options for specific types of X-ray fluorescence analysis. In combination with application modules (application configuration, calibration and standards) or as a package with sample preparation products, complete analytical solutions are created. All Malvern Panalytical products are supported by our after-sales and customer service organization.

In our Knowledge Center, you will find more information about the many interesting XRF applications that are possible with our spectrometers

Zetium

Zetium

Elemental excellence

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Measurement Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification
Elemental range Be-U
Resolution (Mn-Ka) 35eV
LLD 0.1 ppm - 100%
Sample throughput Up to - 240per 8h day
Technology X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF)

Epsilon 1

Epsilon 1

Small, powerful and portable XRF analyzer

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Measurement Elemental analysis, Contaminant detection and analysis, Elemental quantification
Elemental range Na-Am
Resolution (Mn-Ka) 135eV
LLD 1 ppm - 100%
Sample throughput Up to - 80per 8h day
Technology X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF)

Epsilon 4

Epsilon 4

Fast and accurate at-line elemental analysis

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Measurement Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification
Elemental range C-Am
Resolution (Mn-Ka) 135eV
LLD 1 ppm - 100%
Sample throughput Up to - 160per 8h day
Technology X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF)

Epsilon Xflow

Epsilon Xflow

Direct insight in your production process

More details
Measurement Elemental analysis
Elemental range Na-Am
Resolution (Mn-Ka) 135eV
LLD 1 ppm - 100%
Sample throughput on-line/ continuous
Technology X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF)

2830 ZT

2830 ZT

Advanced semiconductor thin film metrology solution

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Measurement Chemical identification, Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification
Elemental range Be-U
Resolution (Mn-Ka) 35eV
Sample throughput up to 25 wafers per hour
LLD 0.1 ppm - 100%
Technology X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF)

Axios FAST

Axios FAST

High sample throughput

More details
Measurement Thin film metrology, Elemental analysis, Elemental quantification
Elemental range Be-U
Resolution (Mn-Ka) 35eV
LLD 0.1 ppm - 100%
Sample throughput Up to - 480per 8h day
Technology X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF)

Zetium

Zetium

Elemental excellence

Epsilon 1

Epsilon 1

Small, powerful and portable XRF analyzer

Epsilon 4

Epsilon 4

Fast and accurate at-line elemental analysis

Epsilon Xflow

Epsilon Xflow

Direct insight in your production process

2830 ZT

2830 ZT

Advanced semiconductor thin film metrology solution

Axios FAST

Axios FAST

High sample throughput

More details More details More details More details More details More details
Measurement Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification Elemental analysis, Contaminant detection and analysis, Elemental quantification Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification Elemental analysis Chemical identification, Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification Thin film metrology, Elemental analysis, Elemental quantification
Elemental range Be-U Na-Am C-Am Na-Am Be-U Be-U
Resolution (Mn-Ka) 35eV 135eV 135eV 135eV 35eV 35eV
LLD 0.1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 0.1 ppm - 100% 0.1 ppm - 100%
Sample throughput Up to - 240per 8h day Up to - 80per 8h day Up to - 160per 8h day on-line/ continuous up to 25 wafers per hour Up to - 480per 8h day
Technology X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF)

Zetium

Epsilon 1

Epsilon 4

Epsilon Xflow

2830 ZT

Axios FAST

Zetium Epsilon 1 Epsilon 4 Epsilon Xflow 2830 ZT Axios FAST

Elemental excellence

Small, powerful and portable XRF analyzer

Fast and accurate at-line elemental analysis

Direct insight in your production process

Advanced semiconductor thin film metrology solution

High sample throughput

More details More details More details More details More details More details
Measurement type
Thin film metrology
Elemental analysis
Contaminant detection and analysis
Elemental quantification
Chemical identification
Technology
X-ray Fluorescence (XRF)
Wavelength Dispersive X-ray Fluorescence (WDXRF)
Energy Dispersive X-ray Fluorescence (EDXRF)
Elemental range Be-U Na-Am C-Am Na-Am Be-U Be-U
LLD 0.1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 1 ppm - 100% 0.1 ppm - 100% 0.1 ppm - 100%
Resolution (Mn-Ka) 35eV 135eV 135eV 135eV 35eV 35eV
Sample throughput Up to - 240per 8h day Up to - 80per 8h day Up to - 160per 8h day on-line/ continuous up to 25 wafers per hour Up to - 480per 8h day