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Morphologi range
Automated imaging for advanced particle characterization
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More details
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| Measurement |
Particle shape, Particle size |
| Particle size range |
0.5µm - 1300µm
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| Technology |
Image analysis |
| Dispersion type |
Wet, Dry |
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Zetium
Elemental excellence
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More details
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| Measurement |
Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
| Elemental range |
Be-U
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| Resolution (Mn-Ka) |
35eV
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| LLD |
0.1 ppm - 100%
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| Sample throughput |
Up to - 240per 8h day
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| Technology |
X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) |
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Epsilon range
Fast and accurate at- and on-line elemental analysis
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More details
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| Measurement |
Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
| Elemental range |
Na-Am
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| Resolution (Mn-Ka) |
145eV
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| LLD |
1 ppm - 100%
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| Sample throughput |
Up to - 160per 8h day
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| Technology |
X-ray Fluorescence (XRF), Energy Dispersive X-ray Fluorescence (EDXRF) |
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Empyrean range
Multipurpose X-ray diffractometers for your analytical needs
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More details
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| Measurement |
Particle shape, Particle size, Crystal structure determination, Phase identification, Phase quantification, Thin film metrology, Contaminant detection and analysis, Residual stress, Epitaxy analysis, Interface roughness, 3D structure / imaging |
| Goniometer configuration |
Vertical goniometer, Θ-Θ and ω-Θ
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| X-ray tube anode material |
Cu, Co,Cr, Mn, Fe, Mo, Ag
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| Detector |
PIXcel1D, PIXcel3D, PIXcel3D 2x2, GaliPIX3D, Proportional counter, Scintilation detector
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| Technology |
X-ray Diffraction (XRD), X-ray Imaging |
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2830 ZT
Advanced semiconductor thin film metrology solution
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More details
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| Measurement |
Chemical identification, Thin film metrology, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
| Elemental range |
Be-U
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| Resolution (Mn-Ka) |
35eV
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| Sample throughput |
up to 25 wafers per hour
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| LLD |
0.1 ppm - 100%
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| Technology |
X-ray Fluorescence (XRF), Wavelength Dispersive X-ray Fluorescence (WDXRF) |
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CNA range
Online elemental analyzers for effective control of many industrial processes
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More details
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| Measurement |
Chemical identification, Elemental analysis, Contaminant detection and analysis, Elemental quantification |
| Accuracy |
1% (non-condensing)
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| Technology |
Pulsed Fast Thermal Neutron Activation (PFTNA) |