Analysis of epitaxial layered structures
High-resolution X-ray diffraction is a powerful tool for the non-destructive structural analysis of epitaxial layers, heterostructures and superlattice systems.
It is a standard tool used in industrial production, as well as during the development phase of epitaxial grown structures.
A lot of important information can be obtained from the diffraction patterns, including:
Even the formation of interdiffusion and intermixing of interfaces can be investigated under certain circumstances.
For a quick inspection, the peak positions of the substrate and layers can be used for the analysis.
However, in general, full pattern simulations based on dynamical scattering theory are applied for the quantitative determination of relevant parameters.
Multipurpose X-ray diffractometers
Versatile research & development XRD system
Versatile research, development & quality control XRD system
