High-resolution X-ray diffraction is nowadays a powerful tool for the non-destructive structural analysis of epitaxial layers, heterostructures and superlattice systems. It is a standard tool used in industrial production as well as in the development phase of epitaxial grown structures.
A lot of important information can be obtained from the diffraction patterns: alloy composition and uniformity of epitaxial layers, their thicknesses, the strain and strain relaxation, and the crystalline perfection related to their dislocation density. Even the formation of interdiffusion and intermixings of interfaces can be investigated under certain circumstances.
For a quick inspection, the peak positions of the substrate and layers can be used for the analysis. However, in general full pattern simulations based on dynamical scattering theory are applied for the quantitative determination of relevant parameters.
Empyrean rangeMultipurpose X-ray diffractometers for your analytical needs |
X'Pert³ MRDVersatile research & development XRD system |
X'Pert³ MRD XLVersatile research, development & quality control XRD system |
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Technology | |||
X-ray Diffraction (XRD) | |||
Measurement type | |||
Epitaxy analysis | |||
Phase identification | |||
Phase quantification | |||
Interface roughness | |||
Thin film metrology | |||
Residual stress | |||
Texture analysis | |||
Reciprocal space analysis | |||
Particle shape | |||
Particle size | |||
Crystal structure determination | |||
Contaminant detection and analysis | |||
3D structure / imaging |