Epitaxy analysis

Analysis of epitaxial layered structures

High-resolution X-ray diffraction is nowadays a powerful tool for the non-destructive structural analysis of epitaxial layers, heterostructures and superlattice systems. It is a standard tool used in industrial production as well as in the development phase of epitaxial grown structures.

A lot of important information can be obtained from the diffraction patterns: alloy composition and uniformity of epitaxial layers, their thicknesses, the strain and strain relaxation, and the crystalline perfection related to their dislocation density. Even the formation of interdiffusion and intermixings of interfaces can be investigated under certain circumstances.

For a quick inspection, the peak positions of the substrate and layers can be used for the analysis. However, in general full pattern simulations based on dynamical scattering theory are applied for the quantitative determination of relevant parameters.

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Empyrean range

Empyrean range

Multipurpose X-ray diffractometers for your analytical needs

X'Pert³ MRD

X'Pert³ MRD

Versatile research & development XRD system

X'Pert³ MRD XL

X'Pert³ MRD XL

Versatile research, development & quality control XRD system

Technology
X-ray Diffraction (XRD)
Measurement type
Epitaxy analysis
Phase identification
Phase quantification
Interface roughness
Thin film metrology
Residual stress
Texture analysis
Reciprocal space analysis
Particle shape
Particle size
Crystal structure determination
Contaminant detection and analysis
3D structure / imaging