Unrivalled performance in X-ray wafer metrology solutions
Instrument performance is one of the key aspects of improving yield and product quality in semiconductor manufacturing. Over the years, Malvern Panalytical has continued to provide its customers with high throughput and best-in-class solutions to support the ever-changing and ever-tightening process requirements in thin-film analysis.
- XRF (2830 ZT) wafer analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, the 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer enables the determination of layer composition, thickness, dopant levels, and surface uniformity for a wide range of wafers up to 300 mm. With excellent light element performance down to boron and with a throughput of up to 25 wafers per hour, 2830 ZT is the best-in-class thin-film metrology tool for semiconductors industry.
- XRD (X'Pert3 MRD and X'Pert3 MRD XL) provides absolute, calibration-free, and accurate information on crystal growth, giving material composition, film thickness, grading profile, and phase and crystal quality