Omega/Theta Pre-installation Manual (English)
Version number: 1
Overview
The Omega/Theta delivers the ultimate in combined precision and speed for determining the crystal lattice orientation. It features many process accessories from barcode readers to mapping tables and a crystal stacking frame. Omega/Theta is your reliable partner for finding the orientation of the crystals and transferring to the next processing step.
The Omega/Theta is your reliable future-proof partner for determining crystal orientation in the fast-evolving semiconductor landscape. Market-leading precision, super-fast measurement speed, and high-end build quality are combined with the power of automation, offering unparalleled efficiency and precision for crystal orientation and alignment in industry and research applications.
Ultra-fast and precise: Azimuthal scan method
The azimuthal scan method requires only one measuring rotation to gather all the necessary data to fully determine the orientation, delivering the results within 10 seconds whilst not compromising accuracy.
The sample is rotated 360°, with the X-ray source and detector positioned to achieve a certain number of reflections per turn.
These reflections enable the orientation of the crystal lattice to be measured in relation to the rotation axis with high precision of up to 0.003°.
User-friendly
All measurements on the Omega/Theta are automated and are managed from within the user-friendly XRD software, which offers ready-made, easy recipe-based measurements for routine workflow.
The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM and similar interfaces.
Characterize a range of materials
Omega/Theta can be used to characterize any single crystalline materials. Commonly used materials include:
- Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
- Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
- Tetragonal: MgF2, TiO2, SrLaAlO4
- Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
- Orthorhombic: Mg2SiO4, NdGaO3
- Any other single crystalline material
Convenient, flexible sample handling
Our wide range of accessories enhances the productivity of Omega/Theta in a variety of applications, from seed boring to boule grinding, to slicing, all the way to wafer end control – keeping you flexible even if those needs change over time.
With specialized sample-holders to meet any need from large ingots to tiny plates, the Omega/Theta can accommodate a wide range of sample sizes – adding value to both production and research.
- Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid
- Stacking stage to align ingots before sawing
- Additional sample rotation axis
- Sample adjustment equipment
- Many more custom engineering solutions!
With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.
Key applications
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- Production
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The Omega/Theta was designed for manufacturers. It’s ideal for the ultra-fast orientation and alignment of various crystal types in production, for marking in-plane directions, or checking the orientation of flats or notches. It is also ideal for production quality control, thanks to its high throughput speeds and automation capabilities.
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Optional extras, such as a stacking stage for aligning ingots before sawing and a rocking curve tool for quality measurements, make the Omega/Theta a versatile partner for production applications.
- Materials research
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The high precision and flexibility of the Omega/Theta means it is ideal for materials research, as it can accommodate a range of samples up to 30 kg and 450 mm in length, with additional stages available for larger or more complex samples.
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It’s able to characterize a wide range of materials, making it highly valuable for your R&D processes – and the flexible Theta Scan opens up a world of measurement possibilities.
