X’Pert³ MRD XL Automation

A fully automated solution for complex layer stack metrology

As an additional software solution for our X’Pert3 MRD XL tool, automation can be integrated into your existing instrument to provide SECS/GEM compliant host control.

With these new capabilities, the MRD XL system can now play out its modularity and flexibility in a host controlled fab environment. This enables ensuring a contamination-free research or production environment. 

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MRD XL Automation brings SECS/GEM functionality to our most advanced wafer analysis instrument, enabling faster, cleaner, and more efficient semiconductor processing than ever. With regular bilateral communication between the equipment and the host computer with the widely used SECS/GEM protocols, this software allows for the entire wafter analysis process to be automated – from wafer selection to measurement, all the way to results distribution.

In addition to faster and more efficient analysis, a fully automated process also means that there is no need for hands-on human intervention. Since humans are the primary contaminator in wafer analysis, this capability is a huge advantage in ensuring a cleaner research or production environment.

Features and benefits

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Advanced automotive capabilities

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Fully customizable options

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Future-proofed functionality

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Modular approach

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Long service lifetime

  • Advanced automotive capabilities
    MRD XL Automation software enables the wafer analysis process to be fully automated, removing the need for human involvement

  • Fully customizable options
    MRD XL Automation software has a fully customizable framework, meaning the configuration can be adapted to meet your individual needs

  • Future-proofed functionality
    Because automation is at the cutting-edge of semiconductor innovation, MRD XL Automation allows your operations to keep pace with rapid industry growth

  • Modular approach
    The X’Pert3 MRD XL is a modular system. With multiple tools and functions available, it can be easily configured to meet your company’s needs. This all-in-one approach means you don’t need to invest as much in new instruments

  • Long service lifetime
    Thanks to top-quality service and support for the MRD XL instrument, this tool will grow alongside your operations


To ensure that your instruments are always in top condition and performing at the highest level, we offer a wide range of services. From our service engineers to our global customer support network, we’re always on hand to offer help, advice, and technical support. So, don’t hesitate to get in touch!

  • Parts replacement and alignment in the field
  • Global customer support network